Effect of Aluminum Content on the Performance of Coatings Based on Al-Si-N / I. A. Bozhko [et al.]
Уровень набора: (RuTPU)RU\TPU\network\11477, Key Engineering Materials, Scientific JournalЯзык: английский.Серия: Advanced Materials and Alloys, Nanomaterials and NanotechnologyРезюме или реферат: The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | магнетронное распыление | механические свойства | нанокомпозитные покрытия | оптические свойства | структурно-фазовые состояния | прозрачные покрытия Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
Title screen
The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples.
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