An arc generator of a broad plasma stream / L. G. Vintizenko [et al.]
Уровень набора: Instruments and Experimental Techniques = 2000-Язык: английский.Резюме или реферат: The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150?10 cm2 and a density of ?1010 cm?3 at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
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The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150?10 cm2 and a density of ?1010 cm?3 at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges.
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