A plasma generator based on nonself-sustained low-pressure glow discharge with a large-volume hollow cathode / I. V. Lopatin [et al.]

Уровень набора: Instruments and Experimental Techniques = 2000-Альтернативный автор-лицо: Lopatin, I. V.;Akhmadeev, Y. K.;Koval, N. N., specialist in the field of electronics, Professor of Tomsk Polytechnic University, Doctor of technical sciences, 1948-, Nikolay Nikolaevich;Shchanin, P. M.Язык: английский.Резюме или реферат: The results of studying nonself-sustained glow discharges in an electrode system with a hollow cathode with a volume of 0.25 m3 are presented. A high-current (up to 35 A) nonself-sustained glow discharge at low pressures (0.3–1.0 Pa) is initiated and sustained with the help of an auxiliary cold-hollow-cathode arc discharge. When the current of a nonself-sustained glow discharge increases from 2 to 35 A, its burning voltage changes from 40 to 300 V. These values are much lower than the voltage for a self-sustained glow discharge in the same electrode system. At a discharge current of 30 A, the electron concentration at the center of the hollow cathode is n e ~ 1010–1011 cm-3 and the electron temperature is T e ˜ 2 eV. The discharge considered can be used in the system for modification of materials and products..Примечания о наличии в документе библиографии/указателя: [References: p. 146 (13 tit.)].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | генератор плазмы | низкое давление | полный катод Ресурсы он-лайн:Щелкните здесь для доступа в онлайн
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[References: p. 146 (13 tit.)]

The results of studying nonself-sustained glow discharges in an electrode system with a hollow cathode with a volume of 0.25 m3 are presented. A high-current (up to 35 A) nonself-sustained glow discharge at low pressures (0.3–1.0 Pa) is initiated and sustained with the help of an auxiliary cold-hollow-cathode arc discharge. When the current of a nonself-sustained glow discharge increases from 2 to 35 A, its burning voltage changes from 40 to 300 V. These values are much lower than the voltage for a self-sustained glow discharge in the same electrode system. At a discharge current of 30 A, the electron concentration at the center of the hollow cathode is n e ~ 1010–1011 cm-3 and the electron temperature is T e ˜ 2 eV. The discharge considered can be used in the system for modification of materials and products.

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