Titanium Macroparticle Fraction Suppression with Steered Arc And Negative Pulse Biasing / A. I. Ryabchikov [et al.]

Уровень набора: Journal of Industrial Pollution ControlАльтернативный автор-лицо: Ryabchikov, A. I., Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences, physicist, 1950-, Aleksandr Ilyich;Sivin, D. O., physicist, Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences, 1978-, Denis Olegovich;Ananin, P. S., physicist, senior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences, 1942-, Petr Semenovich;Shevelev, A. E., Physicist, Engineer of Tomsk Polytechnic University, 1990-, Aleksey Eduardovich;Shulepov, I. A., physicist, Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences, 1954-, Ivan AnisimovichКоллективный автор (вторичный): Национальный исследовательский Томский политехнический университет (ТПУ), Физико-технический институт (ФТИ), Лаборатория № 22Язык: английский.Страна: .Резюме или реферат: The result of experimental study of macroparticles (MPs) accumulation on negatively biased substrate immersed in DC vacuum arc titanium plasma are presented. The influence of normal and tangential to cathode surface magnetic field and high-frequency short-pulsed negative bias has been investigated. It was shown that the application of tangential to cathode surface magnetic field instead of normal one allows to reduce titanium MP surface density 2 fold. Applying of short-pulsed bias leads to decreasing of total MPs surface density after 3 minutes of ion-plasma treatment 30 fold..Примечания о наличии в документе библиографии/указателя: [References: 15 tit.].Тематика: электронный ресурс | труды учёных ТПУ | ionized plasma | macroparticles accumulation | titanium plasma | magnetic field | modeling | ионизованная плазма | микрочастицы | накопления | титан | магнитное поле | моделирование Ресурсы он-лайн:Щелкните здесь для доступа в онлайн
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[References: 15 tit.]

The result of experimental study of macroparticles (MPs) accumulation on negatively biased substrate immersed in DC vacuum arc titanium plasma are presented. The influence of normal and tangential to cathode surface magnetic field and high-frequency short-pulsed negative bias has been investigated. It was shown that the application of tangential to cathode surface magnetic field instead of normal one allows to reduce titanium MP surface density 2 fold. Applying of short-pulsed bias leads to decreasing of total MPs surface density after 3 minutes of ion-plasma treatment 30 fold.

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