APA

Stepanov I. B., Ryabchikov A. I. & Sivin D. O.Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies. : .

Chicago

Stepanov I B, Ryabchikov A I and Sivin D O.Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies. : .

Harvard

Stepanov I. B., Ryabchikov A. I. and Sivin D. O.Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies. : .

MLA

Stepanov I B, Ryabchikov A I and Sivin D O.: . .