APA
Remnev G. E., Opekunov M. S., Vasil'ev V. V., Lukonin E. I., Matvienko V. M. & Furman E. G.A high-current ion accelerator for short-pulse ion implantation. : .
Chicago
Remnev G E, Opekunov M S, Vasil'ev V V, Lukonin E I, Matvienko V M and Furman E G.A high-current ion accelerator for short-pulse ion implantation. : .
Harvard
Remnev G. E., Opekunov M. S., Vasil'ev V. V., Lukonin E. I., Matvienko V. M. and Furman E. G.A high-current ion accelerator for short-pulse ion implantation. : .
MLA
Remnev G E, Opekunov M S, Vasil'ev V V, Lukonin E I, Matvienko V M and Furman E G.: . .