APA

Sidelev D. V., Bleykher (Bleicher) G. A., Krivobokov V. P. & Koyshybaeva Z. K.High-rate magnetron sputtering with hot target. : .

Chicago

Sidelev D V, Bleykher (Bleicher) G A, Krivobokov V P and Koyshybaeva Zh K.High-rate magnetron sputtering with hot target. : .

Harvard

Sidelev D. V., Bleykher (Bleicher) G. A., Krivobokov V. P. and Koyshybaeva Z. K.High-rate magnetron sputtering with hot target. : .

MLA

Sidelev D V, Bleykher (Bleicher) G A, Krivobokov V P and Koyshybaeva Zh K.: . .