APA

Bleykher (Bleicher) G. A., Yuryeva A. V., Shabunin A. S., Krivobokov V. P. & Sidelev D. V.The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering. : .

Chicago

Bleykher (Bleicher) G A, Yuryeva A V, Shabunin A S, Krivobokov V P and Sidelev D V.The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering. : .

Harvard

Bleykher (Bleicher) G. A., Yuryeva A. V., Shabunin A. S., Krivobokov V. P. and Sidelev D. V.The role of thermal processes and target evaporation in formation of self-sputtering mode for copper magnetron sputtering. : .

MLA

Bleykher (Bleicher) G A, Yuryeva A V, Shabunin A S, Krivobokov V P and Sidelev D V.: . .