APA

Uglov V. V., Shimanskii V. I., Korenevsky E. L., Remnev G. E. & Kvasov N. T.Structure and Phase Composition of Multilayer AlN/SiN Films Irradiated with Helium Ions. : .

Chicago

Uglov V V, Shimanskii V I, Korenevsky E L, Remnev G E and Kvasov N T.Structure and Phase Composition of Multilayer AlN/SiN Films Irradiated with Helium Ions. : .

Harvard

Uglov V. V., Shimanskii V. I., Korenevsky E. L., Remnev G. E. and Kvasov N. T.Structure and Phase Composition of Multilayer AlN/SiN Films Irradiated with Helium Ions. : .

MLA

Uglov V V, Shimanskii V I, Korenevsky E L, Remnev G E and Kvasov N T.: . .