APA

Zenkin S. P., Gaydaychuk A. V. & Linnik S. A.Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering. : .

Chicago

Zenkin S P, Gaydaychuk A V and Linnik S A.Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering. : .

Harvard

Zenkin S. P., Gaydaychuk A. V. and Linnik S. A.Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering. : .

MLA

Zenkin S P, Gaydaychuk A V and Linnik S A.: . .