Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H2S Gas Mixture

20210617a2020 k y0engy50 ba

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электронный ресурс
труды учёных ТПУ
HiPIMS
Langmuir probe
optical emission spectrometry
time-resolved probe measurements
H2S
electron density
electron temperature
ionization fraction
SEM
XRD