Title screen.

This teaching aid is dealt with physic-chemical interaction between thin metal, dielectric and semiconductor films and multilayer structures. Discussed are the problems of advanced microelectronics, main properties of thin integral diagram film-technology, laws of thin film growth, filming technique and research, degradation of multilayer thin-film structures under various internal influences. The teaching aid was designed at the Department of Material Science in Mechanical Engineering of the Faculty of Mechanical Engineering, TPU and is intended for students who entered the master's degree program Computer Simulation for Mate-rial Techniques and Processing

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