Investigation of characteristics of titanium coatings deposited by powerful lon beams / V. K. Struts [et al.]

Альтернативный автор-лицо: Struts, V. K.;Matvienko, V. M.;Petrov, A. V.;Ryabchikov, A. I., Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences, physicist, 1950-, Aleksandr Ilyich;Renk, T. J.Язык: английский.Страна: Россия.Резюме или реферат: Titanium coatings were deposited from the ablation plasma formed under a pulse-high power ion beam impinging on the titanium target. The adhesion of titanium coatings to a silicon substrate,film nanohardness, Young modulus and friction coefficient has been investigated dependingon a distance from a sputtered target to substrate and thickness of deposited coatings. X-raystructural analysis and electron microscopy was carried out.Примечания о наличии в документе библиографии/указателя: References: 12 tit..Тематика: труды учёных ТПУ
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References: 12 tit.

Titanium coatings were deposited from the ablation plasma formed under a pulse-high power ion beam impinging on the titanium target. The adhesion of titanium coatings to a silicon substrate,film nanohardness, Young modulus and friction coefficient has been investigated dependingon a distance from a sputtered target to substrate and thickness of deposited coatings. X-raystructural analysis and electron microscopy was carried out

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