Influence of deposition conditions on characteristics of thin-film coatings obtained using high-power ion beams / V. K. Struts [et al.]

Альтернативный автор-лицо: Struts, V. K.;Matvienko, V. M.;Ryabchikov, A. I., Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences, physicist, 1950-, Aleksandr Ilyich;Petrov, A. V.;Shlapakovski, A. S.Язык: английский.Страна: Россия.Резюме или реферат: The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared..Примечания о наличии в документе библиографии/указателя: References: 5 tit..Аудитория: .Тематика: труды учёных ТПУ
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572 References: 5 tit.

The films of titanium and carbon deposited onto silicon and -Fe substrates using high-power ion beams were investigated. The adhesion strength and plasticity of coatings obtained at different deposition conditions have been studied. It has been found that the adhesion strength increases with increasing distance between the substrate and ablated target and with decreasing film thickness determined by a number of accelerator shots. Characteristics of different coatings are compared.

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