APA

Okhotnikov V. V., Linnik S. A. & Gaydaychuk A. V.Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching. : .

Chicago

Okhotnikov V V, Linnik S A and Gaydaychuk A V.Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching. : .

Harvard

Okhotnikov V. V., Linnik S. A. and Gaydaychuk A. V.Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching. : .

MLA

Okhotnikov V V, Linnik S A and Gaydaychuk A V.: . .