APA

Bleykher G. A., Yuryeva A. V., Shabunin A. S., Sidelev D. V. & Grudinin V. A.Features of self-sustained magnetron sputtering of evaporating metal target. : .

Chicago

Bleykher G A, Yuryeva A V, Shabunin A S, Sidelev D V and Grudinin V A.Features of self-sustained magnetron sputtering of evaporating metal target. : .

Harvard

Bleykher G. A., Yuryeva A. V., Shabunin A. S., Sidelev D. V. and Grudinin V. A.Features of self-sustained magnetron sputtering of evaporating metal target. : .

MLA

Bleykher G A, Yuryeva A V, Shabunin A S, Sidelev D V and Grudinin V A.: . .