Unfiltered Aluminium Vacuum Arc Plasma Application for High-Frequency Short-Pulse Plasma Immersion Ion Implantation / A. I. Ryabchikov [et al.]
Уровень набора: (RuTPU)RU\TPU\network\4598, Advanced Materials Research : Advanced materials, synthesis, development and application, Scientific JournalЯзык: английский.Серия: Diagnostics and Engineering of Novel MaterialsРезюме или реферат: This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | микрочастицы | плазма | короткие импульсы | ионная имплантация Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
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This paper is devoted to the studying of the dynamical changes in the density of aluminium microparticles (MPs) on the substrate surface made of stainless steel, immersed in vacuum arc plasma, at high-frequency short-pulse negative bias potential. It is shown experimentally that the density of aluminium MPs on the substrate surface is decreased dynamically by 3 orders when the treatment time is increased from 15 s to 3 min at the bias potential –2 kV. A possibility of the application of MPs unfiltered vacuum arc plasma for high-frequency short-pulse plasma immersion ion implantation to form the intermetallic layers is discussed.
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