Volume Self–Sustained Discharge in Atmospheric Pressure Gas with High Pulse Repetition Frequency / M. V. Zhuravlev, G. E. Remnev, B. G. Shubin
Уровень набора: (RuTPU)RU\TPU\network\5920, Applied Mechanics and Materials, Scientific JournalЯзык: английский.Серия: Material Engineering and TechnologiesРезюме или реферат: The paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | алмазные покрытия | ВЧ-разряд | газы | атмосферное давление Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
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The paper describes a plasma source based on a self-sustained volume discharge for diamond and diamond-like film deposition. The suggested scheme of the electrode system enables to provide stable combustion of the self-sustained volume discharge with high pulse repetition rate in atmospheric pressure gases. Gas flow rate to blow off the interelectrode gap depending on the anode temperature has been considered.
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