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Materials based on films In[2]O[3]:Sn found commercial use as optical materials because of their high reflectance in infra red radiation and transmittance in visible spectrum. This paper investigates effects of treatment of glass substrates with acid (СН[3]COOH), basic (NaOH) etchants and an etchant having oxidation ability and acidic properties (chromic mixture) on optical properties of films In2O3:Sn proposed for solar cells and LEDs. The resulting films are characterized by high transparency 75-90% in visible spectrum for the values ​​of refractive index 1.82-1.90. Substrate treating effect on thickness, resistance and transparency of the films is described. Morphology and optical properties of the films were studied by three-dimensional non-contact profilometry, spectrophotometry and ellipsometry.