Подробная информация: Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O/Si-Al-N

Internal stresses and structure of multilayer coatings on the basis of Zr-Y-O/Si-Al-N / M. V. Fedorischeva [et al.]

Уровень набора: (RuTPU)RU\TPU\network\4816, AIP Conference ProceedingsАльтернативный автор-лицо: Fedorischeva, M. V., Marina;Sergeev, V. P., specialist in the field of materials science, Professor of Tomsk Polytechnic University, doctor of technical Sciences, 1949-, Viktor Petrovich;Kalashnikov, M. P., physicist, Engineer of Tomsk Polytechnic University, Mark Petrovich;Voronov, A. V., AndreiКоллективный автор (вторичный): Национальный исследовательский Томский политехнический университет (ТПУ), Институт физики высоких технологий (ИФВТ), Кафедра физики высоких технологий в машиностроении (ФВТМ);Национальный исследовательский Томский политехнический университет (ТПУ), Институт физики высоких технологий (ИФВТ), Кафедра наноматериалов и нанотехнологий (НМНТ)Язык: английский.Страна: .Резюме или реферат: X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basicallynanocrystalline ZrO[2] and the layers on the basis of Si-Al-N contain Si[3]N[4] amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that thecrystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer..Примечания о наличии в документе библиографии/указателя: [References: p. 150 (14 tit.)].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | внутреннее напряжение | многослойные покрытия | фазовый состав | слои | рентгеновские исследования | ПЭМ | просвечивающая электронная микроскопия Ресурсы он-лайн:Щелкните здесь для доступа в онлайн | Щелкните здесь для доступа в онлайн

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[References: p. 150 (14 tit.)]

X-ray and TEM research of the structure of multilayered coatings consisting of the alternating layers Si-Al-N and Zr-Y-O of equal thickness are carried out. It is shown that the boundaries between different layers are sharp enough, and the chemical composition in each layer is homogeneous. The phase composition of the layers on the basis of Zr-Y-O contains basicallynanocrystalline ZrO[2] and the layers on the basis of Si-Al-N contain Si[3]N[4] amorphous phase. The internal field of stresses is determined by X-ray and TEM analyses. It is established that thecrystal lattice curvaturetorsion and the internal elastic stresses depend on the grain cross-section size of the Zr-Y-O layer.

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