Title screen

[References: p. 1129 (8 tit.)]

We have analyzed the conditions for applicability of evaporation models for description of the erosion of a solid bombarded by high-power nanosecond beams of charged particles. We found that such models do not encompass the energy release range 107--100 J/kg which is important for practical purposes, characterized by significant changes in the density of the condensed phase of the sample and the bulk hydrodynamic character of the evaporation. We suggest a mode!for erosion and the thermodynamic processes in the solid for the given energy release (or higher) based on solution of the equations for a continuous medium, allowing us to correctly take into account the indicated characteristics.

The erosion of a solid surface under high-power pulsed ion beams is considered. The values of atom yield from an irradiated surface due to the evaporation are obtained by numerical simulation. The effect of beam parameters and target characteristics on atom emission intensity was investigated. The technological capabilities of high-power submicrosecond ion beams for solid surface etching are assessed.