Investigation of the structure, elemental and phase composition of coatings on the basis of oxynitride titanium deposited by reactive magnetron sputtering / N. N. Nikitenkov [et al.]

Уровень набора: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Scientific JournalАльтернативный автор-лицо: Nikitenkov, N. N., Russian physicist, Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences, 1953-, Nikolai Nikolaevich;Киселева, Е. С., физик, ассистент, инженер Томского политехнического университета, 1982-, Евгения Сергеевна;Konishchev, M. E., physicist, engineer of Tomsk Polytechnic University, post graduate, 1987-, Maksim Evgenievich;Sypchenko, V. S., physicist, Junior researcher of Tomsk Polytechnic University, assistant, 1987-, Vladimir Sergeevich;Nikitenkov, A. N., physicist, hydrogeologist, associate Professor of Tomsk Polytechnic University, candidate of geological and mineralogical Sciences, 1983-, Aleksey Nikolaevich;Pichugin, V. F., Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences, Physicist, 1944-, Vladimir Fyodorovich;Shulepov, I. A., physicist, Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences, 1954-, Ivan Anisimovich;Mattias, E., EppleКоллективный автор (вторичный): Национальный исследовательский Томский политехнический университет (ТПУ), Физико-технический институт (ФТИ), Кафедра общей физики (ОФ);Национальный исследовательский Томский политехнический университет (ТПУ), Физико-технический институт (ФТИ), Кафедра экспериментальной физики (ЭФ)Язык: английский.Резюме или реферат: The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used..Примечания о наличии в документе библиографии/указателя: [References: p. 1234 (12 tit.)].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ Ресурсы он-лайн:Щелкните здесь для доступа в онлайн
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[References: p. 1234 (12 tit.)]

The structure, morphology and properties of titanium-oxynitride coatings deposited by pulsed reactive magnetron sputtering were investigated. The methods of X-ray diffractometry, Raman spectroscopy, secondary ion mass-spectrometry and scanning electron microscopy are used. It is established that the structure, and the elemental and phase composition of coatings depend on the size of the ratio of oxygen/nitrogen in the composition of the reactive gas, and also on the magnitude of the negative bias applied to the substrate. The increase in the fraction of nitrogen leads to a reduction in the speed of sputtering, to a reduction in the contact angle of wetting, an increase in hardness and a reduction in Young’s modulus when a negative offset was used.

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