Production of a large-volume plasma by a hot-cathode arc / D. P. Borisov, N. N. Koval, P. M. Shchanin
Уровень набора: Russian Physics Journal = 1965-Язык: английский.Резюме или реферат: Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm-3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed..Примечания о наличии в документе библиографии/указателя: [References: p. 299 (8 tit.)].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | плазма | катодная дуга Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
Title screen
[References: p. 299 (8 tit.)]
Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm-3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed.
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