Optical Absorption Peculiarities of Al-Si-N Coatings Produced by Magnetron Sputtering / A. V. Kabyshev [et al.]

Уровень набора: (RuTPU)RU\TPU\network\11477, Key Engineering Materials, Scientific JournalАльтернативный автор-лицо: Kabyshev, A. V., specialist in the field of electric power engineering, Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences, 1958-, Alexander Vasilievich;Konusov, F. V., physicist, Senior Researcher of Tomsk Polytechnic University, Candidate of physical and mathematical sciences, 1958-, Fedor Valerievich;Lauk, A. L., Physicist, Leading engineer of Tomsk Polytechnic University, 1957-, Aleksandr Lukyanovich;Lebedinsky, A. M., electrophysicist, Associate Scientist of Tomsk Polytechnic University, candidate of physico-mathematical Sciences, 1982-, Aleksey Mikhaylovich;Legostaev, V. N., Victor;Smolyanskiy, E. A., Physicist, Research Engineer of Tomsk Polytechnic University, 1985-, Egor AleksandrovichКоллективный автор (вторичный): Национальный исследовательский Томский политехнический университет (ТПУ), Энергетический институт (ЭНИН), Кафедра электроснабжения промышленных предприятий (ЭПП);Национальный исследовательский Томский политехнический университет (ТПУ), Институт физики высоких технологий (ИФВТ), Лаборатория № 1Язык: английский.Серия: Electrophysical and Electrochemical Methods and Technologies of Materials TreatmentРезюме или реферат: In this paper the optical absorption characteristics of Al–Si–N coatings, deposited by magnetron sputtering on the substrates from silicon single crystals and glass were studied. The influence of conditions deposition on optical properties has been determined. The characteristics of interband and exponential absorption are determined by influence of localized states (LS) of defects continuously distributed in the band gap (BG) and reflect the influence on properties of crystalline and amorphous components material of coatings. The interband absorption is realized via the allowed indirect transitions through the optical gap 2.7–2.8 eV and direct transitions through the gap 3.8–3.96 eV. The interrelations between the parameters of interband and exponential absorption are typical for the naterials, whose properties are determined by a static and/or dynamic disordering of the crystal lattice by the defects of a different nature. Maximal average value of the BG width is 4.8–5.1 eV in the scope of semiclassical analysis applied to amorphous and strongly defective materials. The optical parameters of deposited coatings are changed in correlation with a changing of the mechanical characteristics in dependency on the nitrogen pressure..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | оптическое поглощение | покрытия | магнетронное распыление | подложки | монокристаллы | дефекты | оптические характеристики | поглощения Ресурсы он-лайн:Щелкните здесь для доступа в онлайн
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In this paper the optical absorption characteristics of Al–Si–N coatings, deposited by magnetron sputtering on the substrates from silicon single crystals and glass were studied. The influence of conditions deposition on optical properties has been determined. The characteristics of interband and exponential absorption are determined by influence of localized states (LS) of defects continuously distributed in the band gap (BG) and reflect the influence on properties of crystalline and amorphous components material of coatings. The interband absorption is realized via the allowed indirect transitions through the optical gap 2.7–2.8 eV and direct transitions through the gap 3.8–3.96 eV. The interrelations between the parameters of interband and exponential absorption are typical for the naterials, whose properties are determined by a static and/or dynamic disordering of the crystal lattice by the defects of a different nature. Maximal average value of the BG width is 4.8–5.1 eV in the scope of semiclassical analysis applied to amorphous and strongly defective materials. The optical parameters of deposited coatings are changed in correlation with a changing of the mechanical characteristics in dependency on the nitrogen pressure.

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