Protection from High-Velocity Impact Particles for Quartz Glass by Coatings on the Basis of Al-Si-N / I. A. Bozhko [et al.]
Уровень набора: (RuTPU)RU\TPU\network\4816, AIP Conference ProceedingsЯзык: английский.Резюме или реферат: The paper presents the results of the research of the phase composition and the mechanical properties of the coatings on the basis of Al-Si-N system produced by pulsed magnetron sputtering on the KV glass substrates. By the X-ray diffraction method, it has been discovered that the coatings contain AlN phase (hcp) with different thickness. The deposition of Al-Si-N coating system allows both increasing the microhardness of the surface layer of the quartz glass up to 29 GPa, and maintaining high elastic properties (We > 0.70). The laboratory tests have been carried out involving the impact of high-speed flows of iron particles on the Al-Si-N protective coating with different thicknesses produced by pulsed magnetron sputtering. The increase of Al-Si-N coating thickness from 1μm to 10 [mu]m decreases 4-fold the surface density of the craters on the samples caused by a high-speed flow of iron particles..Примечания о наличии в документе библиографии/указателя: [References: 4 tit.].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | высокоскоростной удар | кварцевое стекло | магнетронное осаждение | защитные покрытия | структурно-фазовые состояния | микротвердость | оптические свойства | плотность | magnetron deposition | protective coating | structure-phase state | microhardness | optical properties | crater density Ресурсы он-лайн:Щелкните здесь для доступа в онлайнTitle screen
[References: 4 tit.]
The paper presents the results of the research of the phase composition and the mechanical properties of the coatings on the basis of Al-Si-N system produced by pulsed magnetron sputtering on the KV glass substrates. By the X-ray diffraction method, it has been discovered that the coatings contain AlN phase (hcp) with different thickness. The deposition of Al-Si-N coating system allows both increasing the microhardness of the surface layer of the quartz glass up to 29 GPa, and maintaining high elastic properties (We > 0.70). The laboratory tests have been carried out involving the impact of high-speed flows of iron particles on the Al-Si-N protective coating with different thicknesses produced by pulsed magnetron sputtering. The increase of Al-Si-N coating thickness from 1μm to 10 [mu]m decreases 4-fold the surface density of the craters on the samples caused by a high-speed flow of iron particles.
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