Model of the Anode Layer of a Magnetron Discharge / D. S. Rytchkov, V. P. Krivobokov, D. A. Marakassov
Уровень набора: Russian Physics JournalЯзык: английский.Страна: .Резюме или реферат: The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed..Примечания о наличии в документе библиографии/указателя: [Ref.: p. 1066 (14 tit.)].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | плазма | распылительные системы | токи | модели | применение Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
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[Ref.: p. 1066 (14 tit.)]
The anode layer of the magnetron discharge plasma is considered within the framework of a hydrodynamic approximation with the electron mobility and collision frequency assumed to be constant. A rigorous solution of the system of equations has been obtained. The solutions of this problem known so far have been shown to be particular cases of the one found in this work. The range of applicability of the anode layer model to the calculation of the main parameters of dc magnetron sputtering systems is discussed.
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