The Effect of Deposition Parameters on Microstructure and Mechanical Properties of Ti-Al-Ta-N coatings / A. Shugurov [et al.]
Уровень набора: (RuTPU)RU\TPU\network\4816, AIP Conference ProceedingsЯзык: английский.Резюме или реферат: The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 0.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined..Примечания о наличии в документе библиографии/указателя: [References: 12 tit.].Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | параметры | осаждение | микроструктуры | механические свойства | покрытия | титановые подложки | рентгеновская дифракция | сканирующая электронная микроскопия Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
Title screen
[References: 12 tit.]
The influence of the substrate temperature and nitrogen partial pressure on the structure and mechanical characteristics of Ti-Al-Ta-N coatings was studied by X-ray diffraction, scanning electron microscopy and nanoindentation. The coatings were deposited on commercially pure titanium substrates by d.c. magnetron sputtering. The substrate temperature was varied from 200 to 350°C, while the nitrogen partial pressure changed from 0.04 to 0.10 Pa. The deposition conditions that provide the combination of high deposition rate and optimal coating performance were determined.
Для данного заглавия нет комментариев.
Личный кабинет оставить комментарий.