The Phase Composition and Structure of Silicon-Carbon Coatings / A. S. Rudenkov [et al.]
Уровень набора: (RuTPU)RU\TPU\network\24092, Materials Science Forum, Scientific JournalЯзык: английский.Страна: .Резюме или реферат: The effect of the formation and heat treatment modes of silicon-carbon coatings deposited by ion-beam sputtering of silicon carbide on their morphology, chemical and phase composition is determined. It has been established that an increase in the power of the ion source from 432 W to 738 W leads to a decrease in the sp3/sp2 phase ratio by 1.7 times and an increase in the ratio of Si-C/Si-O bonds by 1.9 times. It is shown that doping of carbon coatings with silicon carbide increases their heat resistance..Аудитория: .Тематика: электронный ресурс | труды учёных ТПУ | Carbon | Ion Beam Sputtering | Phase Composition | Raman Spectroscopy | Roughness | углерод | фазовый состав | ионно-лучевое распыление | рамановская спектроскопия | шероховатость | кремний | покрытия | карбид кремния | термостойкость Ресурсы он-лайн:Щелкните здесь для доступа в онлайнНет реальных экземпляров для этой записи
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The effect of the formation and heat treatment modes of silicon-carbon coatings deposited by ion-beam sputtering of silicon carbide on their morphology, chemical and phase composition is determined. It has been established that an increase in the power of the ion source from 432 W to 738 W leads to a decrease in the sp3/sp2 phase ratio by 1.7 times and an increase in the ratio of Si-C/Si-O bonds by 1.9 times. It is shown that doping of carbon coatings with silicon carbide increases their heat resistance.
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