Magnetron Deposition of Cr Coatings with RF-ICP Assistance / D. V. Sidelev, V. A. Grudinin, K. A. Zinkovsky [et al.]

Уровень набора: CoatingsАльтернативный автор-лицо: Sidelev, D. V., physicist, engineer of Tomsk Polytechnic University, 1991-, Dmitry Vladimirovich;Grudinin, V. A., physicist, engineer of Tomsk Polytechnic University, 1995-, Vladislav Alekseevich;Zinkovsky, K. A., specialist in the field of nuclear technologies, engineer of Tomsk Polytechnic University, 2000-, Konstantin Alekseevich;Alkenova, K. A., Kamilla Azamatovna;Bleykher (Bleicher), G. A., physicist, Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences, 1961-, Galina AlekseevnaКоллективный автор (вторичный): Национальный исследовательский Томский политехнический университет, Инженерная школа ядерных технологий, Научно-образовательный центр Б. П. ВейнбергаЯзык: английский.Резюме или реферат: The article describes a comparative analysis of chromium coatings deposited by magnetron sputtering with and without ion assistance induced by a radiofrequency inductively coupled plasma (RF-ICP) source. Four series of 2 µm-thick Cr coatings were prepared, and then their cross-sectional microstructure, crystal structure and corrosion resistance were investigated by scanning and transmission electron microscopy, X-ray diffraction and a potentiodynamic polarization method. RF-ICP assistance led to significant enhancement (almost twofold) of ion current density in a substrate. The role of RF-ICP assistance in coating properties for planetary-rotated substrates was defined in terms of ion-to-atom ratio in particle flux entering a substrate. Calculations of particle and ion flux densities revealed an increase in ion-to-atom ratio from 0.18 to 1.43 and 0.11 to 0.84 in substrate positions distant from the magnetron sputtering systems depending on their design. RF-ICP assistance is beneficial for depositing dense Cr coatings with increased corrosion resistance in a 3.5 wt.% NaCl solution. The corrosion rate of AISI 321 steel can be decreased from 6.2 × 10−6 to 4.0 × 10−8 mm/year by deposition of the dense Cr coating..Примечания о наличии в документе библиографии/указателя: [References: 44 tit.].Тематика: электронный ресурс | труды учёных ТПУ | magnetron sputtering | Cr coatings | corrosion resistance | RF-ICP assistance | cross-sectional microstructure | crystal structure | магнетронное напыление | хромовые покрытия | устойчивость | коррозии | поперечное сечение Ресурсы он-лайн:Щелкните здесь для доступа в онлайн
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[References: 44 tit.]

The article describes a comparative analysis of chromium coatings deposited by magnetron sputtering with and without ion assistance induced by a radiofrequency inductively coupled plasma (RF-ICP) source. Four series of 2 µm-thick Cr coatings were prepared, and then their cross-sectional microstructure, crystal structure and corrosion resistance were investigated by scanning and transmission electron microscopy, X-ray diffraction and a potentiodynamic polarization method. RF-ICP assistance led to significant enhancement (almost twofold) of ion current density in a substrate. The role of RF-ICP assistance in coating properties for planetary-rotated substrates was defined in terms of ion-to-atom ratio in particle flux entering a substrate. Calculations of particle and ion flux densities revealed an increase in ion-to-atom ratio from 0.18 to 1.43 and 0.11 to 0.84 in substrate positions distant from the magnetron sputtering systems depending on their design. RF-ICP assistance is beneficial for depositing dense Cr coatings with increased corrosion resistance in a 3.5 wt.% NaCl solution. The corrosion rate of AISI 321 steel can be decreased from 6.2 × 10−6 to 4.0 × 10−8 mm/year by deposition of the dense Cr coating.

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