Title screen

[References: 33 tit.]

The quantitative analysis and depth profiling of a co-deposition simulating the impurity of the international thermonuclear experimental reactor (ITER) has been performed by using laser-induced breakdown spectroscopy (LIBS). In the depth profile analysis of a co-deposition of Al/W/Mo, the materials were resolved across the interfaces of layers using four different values of laser fluence. The variation in concentration of materials across the interfaces was observed for seven laser shots with each fluence value. The calibration-free LIBS analysis provided elemental abundance across the interfaces. The decay and rise occurred slowly in the evolution of the elemental percentage of the two materials across the interfaces as material ablated by the laser pulse having a Gaussian beam profile. The quantitative and depth profiling results are fully agreed in material analysis across the interfaces of layers. The results obtained through depth profiling and quantitative analysis of co-deposition evidenced that LIBS is a promising technique for the diagnosis of unknown materials of impurity deposition in the fusion devices.