TY  - ELEC
AU  - Khodyrevskaya, Y. I.
AU  - Romanenko, S. E.
ED  - National Research Tomsk Polytechnic University
TI  - Obtaining antireflection optical coatings by using dual magnetron sputtering system
T2  - Section VIII: Modern Physical Methods in Science, Engineering and Medicine
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
N2  - [ÐÐ¸Ð±Ð»Ð¸Ð¾Ð³Ñ.: Ñ. 174 (6 Ð½Ð°Ð·Ð².)]
UR  - http://www.lib.tpu.ru/fulltext/v/Conferences/2012/C2/ENG/eng_080.pdf
ER  -