TY  - ELEC
AU  - Sidelev, D. V.
AU  - Yurjev, Y. N.
ED  - National Research Tomsk Polytechnic University
TI  - Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings
T2  - Section VIII: Modern Physical Methods in Science, Engineering and Medicine
KW  - труды учёных ТПУ
KW  - электронный ресурс
N2  - [Библиогр.: с. 182 (6 назв.)]
UR  - http://www.lib.tpu.ru/fulltext/v/Conferences/2012/C2/ENG/eng_084.pdf
ER  -