TY  - BOOK
AU  - Behrisch, R.
TI  - Sputtering by particle. Bombardment I
T2  - Topics in applied physics
VL  - Vol. 47
PY  - 1981///
CY  - New York
PB  - Springer-Verlag
KW  - Ð¢Ð²ÐµÑÐ´ÑÐµ ÑÐµÐ»Ð°
KW  - ÐÐ¾Ð²ÐµÑÑÐ½Ð¾ÑÑÐ½ÑÐµ ÑÐ²Ð»ÐµÐ½Ð¸Ñ
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KW  - stltpush
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KW  - ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ðµ
KW  - Ð¿ÑÐ¸ÐºÐ»Ð°Ð´Ð½Ð°Ñ ÑÐ¸Ð·Ð¸ÐºÐ°
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KW  - Ð¸Ð¾Ð½Ñ
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KW  - Ð¼Ð¾Ð½Ð¾ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð¸ÑÐµÑÐºÐ¸Ðµ ÑÐ²ÐµÑÐ´ÑÐµ ÑÐµÐ»Ð°
KW  - Ð¿Ð¾Ð»Ð¸ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð¸ÑÐµÑÐºÐ¸Ðµ ÑÐµÐ»Ð°
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KW  - Ð¿ÑÐ¸Ð¼ÐµÐ½ÐµÐ½Ð¸Ðµ
KW  - Ð°Ð½Ð³Ð»Ð¸Ð¹ÑÐºÐ¸Ð¹ ÑÐ·ÑÐº
KW  - 539.211
KW  - 4
N2  - Author Index: p. 265-274; Subject Index: p. 275-281
ER  -