TY  - BOOK
AU  - Ryabchikov, A. I.
AU  - Ryabchikov, I. A.
AU  - Stepanov, I. B.
AU  - Usov, Y. P.
TI  - High-Frequency Short-Pulsed Metal Plasma-Immersion Ion Implantation Using Filtered DC Vacuum-Arc Plasma
KW  - труды учёных ТПУ
ER  -