TY  - BOOK
AU  - Ryabchikov, A. I.
AU  - Ryabchikov, I. A.
AU  - Stepanov, I. B.
TI  - Development of filtered DC metal plasma ion implantation and coating deposition methods based on high-frequency short-pulsed bias voltage application
KW  - труды учёных ТПУ
ER  -