TY  - ELEC
AU  - Nesterenko, T. G.
AU  - Vtorushin, S. E.
AU  - ÐÐ°ÑÐ±Ð¸Ð½, Ð. Ð¡.
AU  - Koleda, A. N.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ (Ð¢ÐÐ£)
TI  - Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð°Ð½Ð¸Ð·Ð¾ÑÑÐ¾Ð¿Ð¸Ñ
KW  - Ð¼Ð¾Ð½Ð¾ÐºÑÐ¸ÑÑÐ°Ð»Ð»Ð¸ÑÐµÑÐºÐ¸Ð¹ ÐºÑÐµÐ¼Ð½Ð¸Ð¹
KW  - Ð´Ð¸Ð½Ð°Ð¼Ð¸ÑÐµÑÐºÐ¸Ðµ ÑÐ°ÑÐ°ÐºÑÐµÑÐ¸ÑÑÐ¸ÐºÐ¸
KW  - Ð³Ð¸ÑÐ¾ÑÐºÐ¾Ð¿Ñ
N2  - [References: 9 tit.]
UR  - http://dx.doi.org/10.1088/1757-899X/81/1/012096
UR  - http://earchive.tpu.ru/handle/11683/14740
ER  -