TY  - ELEC
AU  - Shanenkov, I. I.
AU  - Sivkov, A. A.
AU  - Ivashutenko, A. S.
AU  - Shanenkova, Yu. L.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ (Ð¢ÐÐ£)
TI  - The plasma dynamic synthesis of aluminum nitride in system with gaseous and solid precursors
T2  - Materials and technologies new generations
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð¿Ð»Ð°Ð·Ð¼Ð°
KW  - Ð´Ð¸Ð½Ð°Ð¼Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ¸Ð½ÑÐµÐ·
KW  - Ð½Ð¸ÑÑÐ¸Ð´ Ð°Ð»ÑÐ¼Ð¸Ð½Ð¸Ñ
KW  - Ð¿Ð¾Ð»ÑÐ¿ÑÐ¾Ð²Ð¾Ð´Ð½Ð¸ÐºÐ¾Ð²ÑÐµ Ð¿ÑÐ¸Ð±Ð¾ÑÑ
KW  - ÐºÐµÑÐ°Ð¼Ð¸ÐºÐ°
KW  - ÑÐµÐ½ÑÐ³ÐµÐ½Ð¾Ð²ÑÐºÐ°Ñ Ð´Ð¸ÑÑÐ°ÐºÑÐ¾Ð¼ÐµÑÑÐ¸Ñ
N2  - [References: 20 tit.]
UR  - http://dx.doi.org/10.1088/1757-899X/93/1/012051
UR  - http://earchive.tpu.ru/handle/11683/20069
ER  -