TY  - ELEC
AU  - Bayazitov, R. M.
AU  - Zakirzyanova, L. Kh.
AU  - Khaibullin, I. B.
AU  - Remnev, G. E.
TI  - Formation of heavily doped semiconductor layers by pulsed ion beam treatmen
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
N2  - [References: p. 38 (12 tit.)]
UR  - http://dx.doi.org/10.1016/S0168-583X(96)00637-4
ER  -