TY  - ELEC
AU  - Safonov, A.
AU  - Sulyaeva, V.
AU  - Timoshenko, N.
AU  - Gatapova, E.
AU  - Kabov, O. A.
AU  - Kirichenko, E.
AU  - Semenov, A.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ (Ð¢ÐÐ£)
TI  - Deposition and Investigation of Hydrophobic Coatings
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð¾ÑÐ»Ð¾Ð¶ÐµÐ½Ð¸Ñ
KW  - Ð³Ð¸Ð´ÑÐ¾ÑÐ¾Ð±Ð½ÑÐµ Ð¿Ð¾ÐºÑÑÑÐ¸Ñ
KW  - Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°Ð½Ð¸Ñ
KW  - ÑÑÐ¾ÑÐ¿Ð¾Ð»Ð¸Ð¼ÐµÑÑ
N2  - [References: 14 tit.]
UR  - http://dx.doi.org/10.1051/matecconf/20153701047
UR  - http://earchive.tpu.ru/handle/11683/32656
ER  -