TY  - ELEC
AU  - Panchenko, Yu. N.
AU  - Andreev, M. V.
AU  - Losev, V. F.
AU  - Puchikin, A. V.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ (Ð¢ÐÐ£)
TI  - KrF laser with a power of 100 W
T2  - Gas and Plasma Lasers, Metal Vapor
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð»Ð°Ð·ÐµÑÐ½ÑÐµ Ð¸Ð¼Ð¿ÑÐ»ÑÑÑ
KW  - ÑÑÑÐµÐºÑÐ¸Ð²Ð½Ð¾ÑÑÑ
KW  - Ð¼Ð¾ÑÐ½Ð¾ÑÑÑ
KW  - Ð³ÐµÐ½ÐµÑÐ°ÑÐ¾ÑÑ
KW  - ÑÑÐ¸Ð»Ð¸ÑÐµÐ»Ð¸
N2  - [References: 14 tit.]
UR  - http://dx.doi.org/10.1117/12.2224714
UR  - http://earchive.tpu.ru/handle/11683/17660
ER  -