TY - ELEC AU - Surmenev, R. A. AU - Tyurin, A. I. AU - Surmeneva (Ryabtseva), M. A. AU - Mukhametkaliyev, T. M. AU - Teresov, A. D. AU - Koval, N. N. AU - Pirozhkova, T. S. AU - Shuvarin, I. A. AU - Oehr, C. TI - Comparative study of the radio-frequency magnetron sputter depositedCaP films fabricated onto acid-etched or pulsed electronbeam-treated titanium KW - электронный ресурс KW - труды учёных ТПУ KW - electron beam treatment KW - substrate preparation N2 - [References: p. 224 (49 tit.)] UR - http://dx.doi.org/10.1016/j.tsf.2014.10.049 ER -