TY  - ELEC
AU  - Akhmadeev, Yu. H.
AU  - Grigoriev, S. V.
AU  - Koval, N. N.
AU  - Schanin, P. M.
TI  - Plasma sources based on a low-pressure arc discharge
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð´ÑÐ³Ð¾Ð²Ð¾Ð¹ ÑÐ°Ð·ÑÑÐ´
KW  - Ð¸ÑÑÐ¾ÑÐ½Ð¸Ðº Ð¿Ð»Ð°Ð·Ð¼Ñ
N2  - [References: p. 253-245]
UR  - http://dx.doi.org/10.1017/S0263034603212131
ER  -