TY  - ELEC
AU  - Musil, Y.
AU  - Javdosnak, D.
AU  - Cerstvy, R.
AU  - Haviar, S.
AU  - Remnev, G. E.
AU  - Uglov, V. V.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ (Ð¢ÐÐ£)
TI  - Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð¼Ð°Ð³Ð½ÐµÑÑÐ¾Ð½Ð½Ð¾Ðµ ÑÐ°ÑÐ¿ÑÐ»ÐµÐ½Ð¸Ðµ
KW  - Ð·Ð°ÑÐ¸ÑÐ½ÑÐµ Ð¿Ð¾ÐºÑÑÑÐ¸Ñ
KW  - Al-Si-N
N2  - [References: p. 44-45 (16 tit.)]
UR  - http://dx.doi.org/10.1016/j.vacuum.2016.08.014
ER  -