TY  - ELEC
AU  - Aktaev, N. E.
AU  - Remnev, G. E.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ (Ð¢ÐÐ£)
TI  - Modeling of carbon penetration into silicon structure under the action of pulsed high-intensity ion beam
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð¸Ð¾Ð½Ð½ÑÐµ Ð¿ÑÑÐºÐ¸
KW  - ÐºÐ¾Ð½ÑÐµÐ½ÑÑÐ°ÑÐ¸Ñ
KW  - Ð¸Ð¼Ð¿Ð»Ð°Ð½ÑÐ°ÑÐ¸Ñ
KW  - ÑÐ¸ÑÐ»ÐµÐ½Ð½Ð¾Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸ÑÐ¾Ð²Ð°Ð½Ð¸Ðµ
KW  - Ð·Ð°Ð´Ð°ÑÐ° Ð¡ÑÐµÑÐ°Ð½Ð°
KW  - ÑÐ³Ð»ÐµÑÐ¾Ð´
KW  - ÐºÑÐµÐ¼Ð½Ð¸Ð¹
KW  - Ð¸Ð¼Ð¿ÑÐ»ÑÑÐ½ÑÐµ Ð¿ÑÑÐºÐ¸
N2  - [References: p. 57 (18 tit.)]
UR  - http://dx.doi.org/10.1016/j.surfcoat.2016.04.050
ER  -