TY  - ELEC
AU  - Parfenova, E. S.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ (Ð¢ÐÐ£)
TI  - The Mathematical Modeling of the Initial Stage of Ion Implantation into the Target with Coating
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð¿Ð¾ÐºÑÑÑÐ¸Ñ
KW  - ÑÐ¿ÑÑÐ³Ð¸Ðµ Ð²Ð¾Ð»Ð½Ñ
KW  - Ð´ÐµÑÐ¾ÑÐ¼Ð°ÑÐ¸Ð¸
KW  - Ð´Ð¸ÑÑÑÐ·Ð¸Ð¸
KW  - Ð¼Ð°ÑÐµÐ¼Ð°ÑÐ¸ÑÐµÑÐºÐ¸Ðµ Ð¼Ð¾Ð´ÐµÐ»Ð¸
KW  - Ð¸Ð¾Ð½Ð½Ð°Ñ Ð¸Ð¼Ð¿Ð»Ð°Ð½ÑÐ°ÑÐ¸Ñ
KW  - Ð¼Ð¸ÑÐµÐ½Ð¸
KW  - coating
KW  - deformation
KW  - diffusion
KW  - elastic wave
KW  - mathematical model
KW  - stress
UR  - http://dx.doi.org/10.4028/www.scientific.net/KEM.743.138
ER  -