TY  - ELEC
AU  - Sivkov, A. A.
AU  - Gerasimov, D. Yu.
AU  - Evdokimov, A. A.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ
TI  - The Effect of Nitrogen Pressure in the Reaction Chamber on the Parameters of Titanium Nitride Obtained by Plasmodynamic Synthesis
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - Ð¿Ð»Ð°Ð·Ð¼Ð¾Ð´Ð¸Ð½Ð°Ð¼Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ¸Ð½ÑÐµÐ·
KW  - Ð½Ð°Ð½Ð¾ÑÐ°Ð·Ð¼ÐµÑÐ½ÑÐµ ÑÐ°ÑÑÐ¸ÑÑ
KW  - Ð°Ð·Ð¾Ñ
N2  - [References: p. 649 (46 tit.)]
UR  - https://doi.org/10.1134/S1995078017060106
ER  -