TY  - ELEC
AU  - Hubicka, Z.
AU  - Cada, M.
AU  - Kapran, A.
AU  - Olejnícek, J.
AU  - Ksírová, P.
AU  - Zanaska, M.
AU  - Adamek, P.
AU  - Tichy, M.
TI  - Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H2S Gas Mixture
KW  - электронный ресурс
KW  - труды учёных ТПУ
KW  - HiPIMS
KW  - Langmuir probe
KW  - optical emission spectrometry
KW  - time-resolved probe measurements
KW  - H2S
KW  - electron density
KW  - electron temperature
KW  - ionization fraction
KW  - SEM
KW  - XRD
N2  - [References: 57 tit.]
UR  - https://doi.org/10.3390/coatings10030246
ER  -