TY  - ELEC
AU  - Ryabchikov, A. I.
ED  - ÐÐ°ÑÐ¸Ð¾Ð½Ð°Ð»ÑÐ½ÑÐ¹ Ð¸ÑÑÐ»ÐµÐ´Ð¾Ð²Ð°ÑÐµÐ»ÑÑÐºÐ¸Ð¹ Ð¢Ð¾Ð¼ÑÐºÐ¸Ð¹ Ð¿Ð¾Ð»Ð¸ÑÐµÑÐ½Ð¸ÑÐµÑÐºÐ¸Ð¹ ÑÐ½Ð¸Ð²ÐµÑÑÐ¸ÑÐµÑ
TI  - High-Intensity Implantation With an Ion Beam's Energy Impact on Materials
KW  - ÑÐ»ÐµÐºÑÑÐ¾Ð½Ð½ÑÐ¹ ÑÐµÑÑÑÑ
KW  - ÑÑÑÐ´Ñ ÑÑÑÐ½ÑÑ Ð¢ÐÐ£
KW  - energy impact
KW  - high-Intensity Implantation
KW  - ion beam
KW  - material properties modification
KW  - synergistic
KW  - ÑÐ½ÐµÑÐ³ÐµÑÐ¸ÑÐµÑÐºÐ¾Ðµ Ð²Ð¾Ð·Ð´ÐµÐ¹ÑÑÐ²Ð¸Ðµ
KW  - Ð¸Ð¼Ð¿Ð»Ð°Ð½ÑÐ°ÑÐ¸Ñ
KW  - Ð¼Ð¾Ð´Ð¸ÑÐ¸ÐºÐ°ÑÐ¸Ð¸
KW  - ÑÐ²Ð¾Ð¹ÑÑÐ²Ð°
KW  - Ð¼Ð°ÑÐµÑÐ¸Ð°Ð»Ñ
KW  - ÑÐ¸Ð½ÐµÑÐ³ÐµÑÐ¸ÐºÐ°
KW  - Ð¸Ð¾Ð½Ð½ÑÐµ Ð¿ÑÑÐºÐ¸
N2  - [References: 67 tit.]
UR  - https://doi.org/10.1109/TPS.2021.3073942
ER  -