Найдено 2 результатов.

Сортировать
Результаты
1.
Size effect in AlN/SiN multilayered films irradiated with helium and argon ions / V. V. Uglov [et al.]Уровень набора: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and AtomsДоступность: :

2.
Thermal Stability of TiZrAlN and TiZrSiN Films Formed by Reactive Magnetron Sputtering / G. Abadias [et al.]Уровень набора: Inorganic Materials: Applied ResearchДоступность: :