| 000 | 02861nlm0a2200517 4500 | ||
|---|---|---|---|
| 001 | 172856 | ||
| 005 | 20231029194008.0 | ||
| 035 | _a(RuTPU)RU\TPU\book\187464 | ||
| 090 | _a172856 | ||
| 100 | _a20091216d2009 m y0engy50 ba | ||
| 101 | 0 | _aeng | |
| 102 | _aRU | ||
| 105 | _ay j 001zy | ||
| 135 | _avrcn ---uucaa | ||
| 200 | 1 |
_aThin Films and Multilayers for Electronics _bElectronic resource _dТонкие пленки и многослойные материалы для электроники _estudy aid _fTomsk Polytechnic University (TPU) ; comp. A. V. Panin |
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| 203 |
_aText _celectronic |
||
| 210 |
_aTomsk _cTPU Publishing House _d2009 |
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| 230 | _a1 компьютерный файл (pdf; 3348 KB) | ||
| 300 | _aTitle screen. | ||
| 330 | _aThis teaching aid is dealt with physic-chemical interaction between thin metal, dielectric and semiconductor films and multilayer structures. Discussed are the problems of advanced microelectronics, main properties of thin integral diagram film-technology, laws of thin film growth, filming technique and research, degradation of multilayer thin-film structures under various internal influences. The teaching aid was designed at the Department of Material Science in Mechanical Engineering of the Faculty of Mechanical Engineering, TPU and is intended for students who entered the master's degree program Computer Simulation for Mate-rial Techniques and Processing | ||
| 333 | _aРежим доступа: из корпоративной сети ТПУ | ||
| 337 | _aAdobe Reader | ||
| 510 | 1 |
_aТонкие пленки и многослойные материалы для электроники _zrus _eучебное пособие |
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| 606 | 1 |
_aПленки тонкие _xПолучение _2stltpush _3(RuTPU)RU\TPU\subj\49236 |
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| 610 | 1 | _athin films | |
| 610 | 1 | _aMultilayers | |
| 610 | 1 | _aelectronics | |
| 610 | 1 | _aтруды учёных ТПУ | |
| 610 | 1 | _aэлектронный ресурс | |
| 610 | 1 | _aанглийский язык | |
| 610 | 1 | _aтонкие пленки | |
| 610 | 1 | _aэлектроника | |
| 610 | 1 | _aмногослойные материалы | |
| 610 | 1 | _aмикропленка | |
| 610 | 1 | _aтехнологии | |
| 610 | 1 | _aполучение | |
| 610 | 1 | _aисследование | |
| 610 | 1 | _aдеградация | |
| 610 | 1 | _aбарьеры Шоттки | |
| 675 |
_a621.382.049.772 _v3 |
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| 702 | 1 |
_aPanin _bA. V. _cphysicist _cProfessor of Tomsk Polytechnic University, doctor of physical and mathematical Sciences _f1971- _gAlexey Viktorovich _2stltpush _3(RuTPU)RU\TPU\pers\34630 _4220 |
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| 712 | 0 | 2 |
_aTomsk Polytechnic University (TPU) _2stltpush _3(RuTPU)RU\TPU\col\452 |
| 801 | 1 |
_aRU _b63413507 _c20091216 |
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| 801 | 2 |
_aRU _b63413507 _c20150521 _gRCR |
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| 856 | 4 | _uhttp://www.lib.tpu.ru/fulltext2/m/2009/m166.pdf | |
| 942 | _cCF | ||